Design and Modeling of a Micro Pressure Sensor for Biomedical Applications
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Date
2025
Journal Title
Journal ISSN
Volume Title
Publisher
University of Msila
Abstract
This memory focuses on the modeling and design of a pressure sensor for biomedical
applications. The sensor is a capacitive MEMS (microelectromechanical systems) device used to
measure blood pressure. Its sensing element is a thin circular silicon membrane [100], tightly
clamped at the edges and subjected to a uniform static pressure. The analysis was performed
assuming small deformations.
In the first part of the work, the mechanical behavior of the membrane was studied. Based
on accurate mathematical equations, we modeled the membrane deformation, capacitive response,
and sensor sensitivity using MATLAB. The results demonstrate a linear capacitive response over
a pressure range of 0 to 40 kPa (0 to 300 mmHg), with high sensitivity. These results were validated
through numerical simulations using COMSOL Multiphysics.
In the second part of the memory, the capacitive pressure sensor was integrated into a
conditioning circuit simulated using PSPICE. The circuit's output voltage varies linearly with the
applied pressure.
Description
Keywords
MEMS, capacitive pressure sensor, membrane, silicon, sensitivity, COMSOL Multiphysics, PSPICE